16 September 1994 Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor
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Abstract
Multiloop PI control and quadratic dynamic matrix control (QDMC) algorithms are applied for the temperature uniformity control of rapid thermal processing (RTP). Input and output variable transformations are done based on the singular value decomposition (SVD) of the process gain matrix and the (mu) -interaction measure analysis of compensated transfer function matrix. Multiloop PI control with transformation of variables shows improvement in transient responses to set point changes compared with the multiloop PI control without variable transformations and QDMC. Further studies on systematic tuning method for this multiloop PI control is needed to reduce the offsets and to obtain the uniform transient responses.
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K. S. Balakrishnan, K. S. Balakrishnan, Wonhui Cho, Wonhui Cho, Thomas F. Edgar, Thomas F. Edgar, } "Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186774; https://doi.org/10.1117/12.186774
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