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16 September 1994 MEMaterial: a new microelectronic material deposition tool
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Abstract
A new material simulation tool is developed which shows physical, thermal, mechanical, electrical and optical properties of thin films as a function of their manufacturing processes. The software uses a unique multidimensional estimation routine developed specifically for properties that vary with several parameters simultaneously. Substantial testing of the estimation software shows reliability of predictions in the range of 2 to 20 percent of the measured property values.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fariborz Maseeh "MEMaterial: a new microelectronic material deposition tool", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186783
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