16 September 1994 Sensor bus control networks in semiconductor processing equipment
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Abstract
The performance, cost and reliability of semiconductor processing equipment is greatly affected by the number and type of sensors and actuators used within the equipment. Current semiconductor processing equipment can include over one thousand sensors and actuators of varying accuracy, cost and performance. The integration of theses sensors and actuators is further complicated by varying, non-standard electrical interfaces to them. The role of a sensor bus based control network is to provide an organized approach for interconnecting sensors, actuators and controllers within a piece of equipment. The goal is to provide a more robust and reliable system with minimal development cost by the equipment supplier and with reduced effective cost to the equipment purchaser. This paper will describe several metrics which are used in evaluating a bus architecture and a methodology for designing a network architecture.
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Ronald S. Gyurcsik, Ronald S. Gyurcsik, W. Christophe Lamb, W. Christophe Lamb, James R. Moyne, James R. Moyne, } "Sensor bus control networks in semiconductor processing equipment", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186781; https://doi.org/10.1117/12.186781
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