16 September 1994 Sensor bus cost of ownership investigation
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Abstract
The performance, cost and reliability of semiconductor processing equipment is greatly affected by the number and type of sensors and actuators used within the equipment. Current semiconductor processing equipment can include over one thousand sensors and actuators of varying accuracy, cost and performance. The integration of theses sensors and actuators is further complicated by varying, non-standard electrical interfaces to them. The role of a sensor bus is to provide an organized approach for interconnecting sensors, actuators and controllers within a piece of equipment. The goal is to provide a more robust and reliable system with minimal development cost by the equipment supplier and with reduced effective cost to the equipment purchaser. The use of a sensor bus can only be justified if it provides a cost benefit to the integrated circuit manufacturer. Otherwise, the manufacturer will purchase less expensive equipment without a sensor bus which provides equal manufacturing performance. The cost of developing and implementing a sensor bus for semiconductor equipment will affect the tools cost, and any added equipment cost must be justified by an effective reduction in cost of ownership by the manufacturer. This paper focuses on the cost-related trade-off associated with a sensor-buss implementation.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ronald S. Gyurcsik, Ronald S. Gyurcsik, } "Sensor bus cost of ownership investigation", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186782; https://doi.org/10.1117/12.186782
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