True wafer temperature during metallization in physical vapor deposition cluster tools

Michael E. Adel; Shmuel Mangan; Howard Grunes; Vijay Parkhe

doi:10.1117/12.186796

16 September 1994 True wafer temperature during metallization in physical vapor deposition cluster tools

Michael E. Adel, Shmuel Mangan, Howard Grunes, Vijay Parkhe

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186796
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

Aluminum metallization is an important process for planarization and interconnect applications. Wafer temperature during deposition is one of the key parameter determining film properties such as reflectivity and resistivity. Results of experiments carried out in order to characterize the thermal behavior of product wafers during physical vapor deposition, primarily aluminum and wafer degas will be presented. The effects of back and front side depositions, backside gas pressure and plasma power level on deposition temperature are all investigated. The utility of real time in-situ temperature monitoring on every product wafer in all deposition chambers within a cluster tool and the advantages provided in terms of process monitoring are discussed.

Citation Download Citation

Michael E. Adel, Shmuel Mangan, Howard Grunes, and Vijay Parkhe "True wafer temperature during metallization in physical vapor deposition cluster tools", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186796

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available