14 September 1994 Display and analysis of 2D and 3D images obtained on semiconductor devices using a laser scanner
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Abstract
A scanning laser computer assisted microscope in which the sample is scanned electromagnetic is used to produce images from semiconductor devices using photo induced current. We obtained 2D and 3D images which were analyzed in connection with current-reverse voltage (I-VR) characteristics of the semiconductor devices. Images are stored in digital memories in real time and then processed with the different programs in order to obtain the required information. Our scanner offers the possibility 2D or 3D images ('map' or graphs) and pixelated images too. The localization of the different defects of the semiconductor devices was made.
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George A. Stanciu, Catalin Miu, Sergiu Stejar, "Display and analysis of 2D and 3D images obtained on semiconductor devices using a laser scanner", Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); doi: 10.1117/12.186632; https://doi.org/10.1117/12.186632
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