14 September 1994 Limitations of submicron holographic lithography
Author Affiliations +
Hologram recording geometry using total internal reflection (TIR) from a photo sensitive material surface was used to achieve 0.5 micron resolution at (lambda) equals 457 nm with a readout of reconstructed image on photoresist. Such a geometry has demonstrated stability to parallel displacement within the illuminated area, and a rotation of +/- 2 degrees. The TIR recording system provided double fringe sets for each plane component inside the volume hologram. Therefore, diffraction efficiency as high as 80% was observed. The result is applicable to high volume submicron lithography and can be expanded for an eight-inch semiconductor submicron pattern. The use of a large aperture, well collimated laser beam provides us with much higher throughput than existing lightography machines have.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ray T. Chen "Limitations of submicron holographic lithography", Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); doi: 10.1117/12.186639; https://doi.org/10.1117/12.186639

Back to Top