14 September 1994 New approach to measuring oxide charge and mobile ion concentration
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Abstract
We discuss the determination of oxide charge from simultaneous noncontact measurement of the surface potential barrier, Vs, (via surface photovoltage) and the voltage drop across the oxide, Vox, (via contact potential vibrating probe). These two measurements enable us to separate the contributions from total charge and oxide charge. In combination with corona charging and low temperature stress, this approach can be used for wafer-scale determination of the mobile Na+ concentration. The principles of the approach are presented and typical results are given which contrast the effects of ion drift and charge injection in the oxide. Experimental results also illustrate the noncontact, wafer-scale mapping of the mobile ion distribution.
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Piotr Edelman, Piotr Edelman, Andrew M. Hoff, Andrew M. Hoff, Lubek Jastrzebski, Lubek Jastrzebski, Jacek J. Lagowski, Jacek J. Lagowski, } "New approach to measuring oxide charge and mobile ion concentration", Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); doi: 10.1117/12.186641; https://doi.org/10.1117/12.186641
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