12 December 1994 Absolute interferometric testing of cylindraical surfaces
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Abstract
Based on our experiences of absolute testing of flats and spherical surfaces we are developing methods for absolute testing of cylindrical surfaces. Three methods are presented and compared with each other. Method I determines the absolute deviations of three cylindrical surfaces from a mathematical cylindrical surface by five measurements. Method II calibrates the interferometer so that afterwards it can be used for absolute testing. Method III determines the absolute deviations of one single cylindrical surface by using two known flats.
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Thomas Bluemel, Thomas Bluemel, Karl-Edmund Elssner, Karl-Edmund Elssner, Ricarda Kafka, Ricarda Kafka, Guenter Schulz, Guenter Schulz, Andreas Vogel, Andreas Vogel, } "Absolute interferometric testing of cylindraical surfaces", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195918; https://doi.org/10.1117/12.195918
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