Correlation method of surface roughness testing using a spatially modulated laser beam

Vladimir P. Ryabukho; Yuri A. Avetisyan; Anastasiya B. Sumanova; Dmitry A. Zimnyakov

doi:10.1117/12.195954

12 December 1994 Correlation method of surface roughness testing using a spatially modulated laser beam

Vladimir P. Ryabukho, Yuri A. Avetisyan, Anastasiya B. Sumanova, Dmitry A. Zimnyakov

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195954
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

A new testing method of the surface roughness is discussed. The method is based on the usage of the probing laser beam with spatial modulation in the form of a regular interference pattern, and of the contrast change effect of the patter in the scattered light depending on the tested surface roughness parameters. The method theory based on the interference of the identical speckle modulated waves formed in the diffraction field is presented. This method permits us to determine phase inhomogeneities standard deviation, correlation length and object phase inhomogeneities form of the correlation coefficient. Experimental results of the phase inhomogeneities of television screens and phase specklegrams testing are presented.

Citation Download Citation

Vladimir P. Ryabukho, Yuri A. Avetisyan, Anastasiya B. Sumanova, and Dmitry A. Zimnyakov "Correlation method of surface roughness testing using a spatially modulated laser beam", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195954

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