12 December 1994 Dispersive white-light profilometer
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Abstract
We demonstrate a new type of a white light profilometer which combines a two-beam Fizeau- type interferometer with a grating spectrometer to realize absolute measurements of the surface profile with high accuracy. Two evaluation methods are discussed and the experimental results show that a measurement repeatability of 0.4 nm can be reached.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Johannes Schwider, Johannes Schwider, Liang Zhou, Liang Zhou, } "Dispersive white-light profilometer", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195934; https://doi.org/10.1117/12.195934
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