12 December 1994 Distortion testing of interferometer for flatness standard measurement
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Abstract
The method for interferometer quality testing and calibration is described. The theoretical analysis and measurement results of the Fizeau interferometer errors are presented and discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leszek A. Salbut, Leszek A. Salbut, Romulad Jozwicki, Romulad Jozwicki, } "Distortion testing of interferometer for flatness standard measurement", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195926; https://doi.org/10.1117/12.195926
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