12 December 1994 Distortion testing of interferometer for flatness standard measurement
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Abstract
The method for interferometer quality testing and calibration is described. The theoretical analysis and measurement results of the Fizeau interferometer errors are presented and discussed.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leszek A. Salbut, Romulad Jozwicki, "Distortion testing of interferometer for flatness standard measurement", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195926; https://doi.org/10.1117/12.195926
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