Holographic reference glass for surface planeness testing

Dmitry N. Yeskov; Sergey N. Koreshev; Alexander G. Seregin

doi:10.1117/12.195948

12 December 1994 Holographic reference glass for surface planeness testing

Dmitry N. Yeskov, Sergey N. Koreshev, Alexander G. Seregin

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195948
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

An interferometer layout is proposed with variable sensitivity of flatness testing. Testing sensitivity variation, i.e., fringe pattern separation variation is carried out by different adjustment of angles of incidence on the surface under test for both information and reference beams. The said principle is advised to be implemented by means of a transmissive diffraction structure with equidistant straight lines upon a working surface of a glass plate, that is by means of a holographic test glass. Results are given of both theoretical and experimental investigation of the interferometer layout proposed being an evidence of a possibility to use the holographic test glasses for flatness testing of ground and polished surfaces of details made of glass, metal or plastic either in white light or monochrome.

Citation Download Citation

Dmitry N. Yeskov, Sergey N. Koreshev, and Alexander G. Seregin "Holographic reference glass for surface planeness testing", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195948

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