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12 December 1994 Mach Zehnder interferometer for measuring microlenses
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Abstract
The growing interest in microlenses and microlens arrays has created a need for measurement systems to characterize their performance, particularly important being the transmitted wavefront and focal length. A Mach Zehnder interferometer has been built into a microscope body to allow fast, convenient, and accurate measurement of these parameters.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel J. Daly, Michael C. Hutley, and Richard F. Stevens "Mach Zehnder interferometer for measuring microlenses", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195919
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