Recent developments in absolute interferometric testing of flats

Karl-Edmund Elssner; Thomas Bluemel; Regina Burow; Ricarda Kafka; Guenter Schulz; Andreas Vogel

doi:10.1117/12.195924

12 December 1994 Recent developments in absolute interferometric testing of flats

Karl-Edmund Elssner, Thomas Bluemel, Regina Burow, Ricarda Kafka, Guenter Schulz, Andreas Vogel

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195924
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

Absolute interferometric flatness testing of the three-flat type has made remarkable progress within the last few years. These developments show improved lateral as well as depth resolution and easier handling.

Citation Download Citation

Karl-Edmund Elssner, Thomas Bluemel, Regina Burow, Ricarda Kafka, Guenter Schulz, and Andreas Vogel "Recent developments in absolute interferometric testing of flats", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195924

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