Design of a commercial optical instrument for surface roughness measurement

Shou-Bin Liu; Hui-Fen Yu

doi:10.1117/12.198686

4 January 1995 Design of a commercial optical instrument for surface roughness measurement

Shou-Bin Liu, Hui-Fen Yu

Proceedings Volume 2349, Industrial Optical Sensors for Metrology and Inspection; (1995) https://doi.org/10.1117/12.198686
Event: Photonics for Industrial Applications, 1994, Boston, MA, United States

Abstract

The design of an intelligent optical instrument for surface roughness measurement is given in this paper. The approach is obtainment of a profile image by light-sectioning method, digitization of the profile image with a camera and an image sampling board, and calculation of roughness parameters with a computer. Principles of measurement range design, camera choosing, thresholding, hardware design and software design etc. are discussed and calibration methods are analyzed. Based on these principles, a commercial optical instrument has been developed whose measurement height is in the range of 0.4 to 120 micrometers . Appearance of the instrument and measuring results are also provided in this paper.

Citation Download Citation

Shou-Bin Liu and Hui-Fen Yu "Design of a commercial optical instrument for surface roughness measurement", Proc. SPIE 2349, Industrial Optical Sensors for Metrology and Inspection, (4 January 1995); https://doi.org/10.1117/12.198686

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