4 January 1995 Optical methods for spatial noise removal in interferometry
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Proceedings Volume 2349, Industrial Optical Sensors for Metrology and Inspection; (1995) https://doi.org/10.1117/12.198675
Event: Photonics for Industrial Applications, 1994, Boston, MA, United States
Abstract
The purpose of this paper is to present an analysis of the interference of light scattered from different planes in a simple interferometer, in order to establish techniques for final output fringe contrast enhancement and spatial noise removal, which are simple to implement. The approach developed here involves modifying the spatial coherence of the illuminating wave. By controlling the correlation length of this wave, a time averaged interferogram along with another for which a (pi) phase shift has been introduced into the reference arm, provides the necessary information to retrieve the fringe pattern of interest without noise. The approach suggested allows the controlling parameters to be easily varied optically in order to deal with different spatial noise types and scales. The benefits of this method are to the case for which the long range and slowly varying surface or index profile under test, is to be accurately measured. Simulations are presented and an evaluation of the effectiveness of the proposed coherence degradation procedures is given.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Liao, C. Liao, Michael A. Fiddy, Michael A. Fiddy, } "Optical methods for spatial noise removal in interferometry", Proc. SPIE 2349, Industrial Optical Sensors for Metrology and Inspection, (4 January 1995); doi: 10.1117/12.198675; https://doi.org/10.1117/12.198675
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