4 January 1995 Role of diode lasers in metrology
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Proceedings Volume 2349, Industrial Optical Sensors for Metrology and Inspection; (1995) https://doi.org/10.1117/12.198681
Event: Photonics for Industrial Applications, 1994, Boston, MA, United States
Abstract
The field of noncontact metrology is maturing as the video camera based and the laser probe based measurements are finding wide acceptance in the fields of semiconductor, micro electronics, disk drive, biomedical, chemical and aerospace industries. Some manufactures of conventional touch-probe based CMMs (Coordinated Measuring Machines) have started integrating video cameras and laser probes to compliment the measurements made by the touch-probe. The delicate nature of the parts and the extremely small feature sizes have fuelled the growing need for the multisensor technology to be incorporated into a single coordinate measuring machine. The laser probes compliment the video based metrology systems in providing the dynamic Z-height capabilities due to their faster data rate and increased resolution and accuracy. This paper highlights the pros and cons of different diode laser based sensors, drawn from the experience of applying them for measurements in different fields.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kris Muthukrishnan, Kris Muthukrishnan, } "Role of diode lasers in metrology", Proc. SPIE 2349, Industrial Optical Sensors for Metrology and Inspection, (4 January 1995); doi: 10.1117/12.198681; https://doi.org/10.1117/12.198681
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