8 September 1994 New-type active vibration isolation system with laser interferometer and piezoelectric displacement transducer
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Proceedings Volume 2358, First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (1994); doi: 10.1117/12.185316
Event: Vibration Measurements by Laser Techniques: First International Conference, 1994, Ancona, Italy
Abstract
A new-type active vibration isolation system is developed for ultra-precision measuring system. It is composed of three sets of 3D Laser interferometer transducer and six groups of piezoelectric displacement executor to constrain six degrees of space movement and to realize real-time compensation of vibration. The active vibration isolation system can effectively eliminate low-frequency vibrations. Combined with passive vibration isolation system, it gives better vibration isolation effect.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boyin Lu, Meirong Zhao, "New-type active vibration isolation system with laser interferometer and piezoelectric displacement transducer", Proc. SPIE 2358, First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (8 September 1994); doi: 10.1117/12.185316; https://doi.org/10.1117/12.185316
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KEYWORDS
Vibration isolation

Interferometers

Transducers

Laser systems engineering

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