26 October 1994 Epitaxial growth of optical LiTaO3 and LiNbO3 waveguide film by pulsed-laser deposition
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Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190783
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China
Abstract
The waveguiding epitaxial LiTaO3 and LiNbO3 films have been prepared on sapphire substrates by pulsed laser deposition technique. The as-grown films were characterized by Raman scattering, XRD and SEM techniques, which revealed that epitaxial LiTaO3 and LiNbO3 films with small roughness were achieved on (001) and (012) sapphire substrates, respectively. Optical waveguiding properties were demonstrated by m-line measurement of TM and TE modes.
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Junming Liu, Junming Liu, Zhiguo Liu, Zhiguo Liu, Shining Zhu, Shining Zhu, Zhuangchun Wu, Zhuangchun Wu, Ming-Sheng Zhang, Ming-Sheng Zhang, Duan Feng, Duan Feng, } "Epitaxial growth of optical LiTaO3 and LiNbO3 waveguide film by pulsed-laser deposition", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190783; https://doi.org/10.1117/12.190783
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