New approach to computer simulation of thin film deposition

Shi Xu; G. Q. Lu

doi:10.1117/12.190792

26 October 1994 New approach to computer simulation of thin film deposition

Shi Xu, G. Q. Lu

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190792
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

A 3D atomistic thin film deposition model has been successfully developed. The effect of the atomic mobility on substrate and film surface has been studied by using the model that simulates 3D thin film images, surface profiles and cross-sectional area pictures. In addition, quantitative results of surface RMS roughness, average film thickness, atomic coordination number and its distribution, and solid fraction of the deposited thin films are obtained from the simulations. When the film surface mobility increases from 0.3 to 3.0, RMS roughness decreases from 6.5 to 1.1, solid fraction increases from 0.27 to 0.46 and average film thickness decreases from 40 to 28 due to the diminishing of the voids within the film. The FWHM of the atomic coordination distribution becomes narrower indicating the increased degree of crystallization. With the increase in surface mobility crossing the boundary 1.5, the film evolves from a porous or loose columnar structure with voids to a densely packed fibrous grain structure which can be categorized by the zone structure models.

Citation Download Citation

Shi Xu and G. Q. Lu "New approach to computer simulation of thin film deposition", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190792

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available