26 October 1994 Study of soft x-ray multilayer thin film
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Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190753
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China
Abstract
In this paper, normal incidence soft x-ray multilayer mirrors for 23.4 nm, 8.89 nm, and 4.47 nm have been fabricated by planar magnetron, the multilayer is characterized with low angle x-ray diffraction and TEM technique. The absolute reflectivity is measured at the synchronization radiation facility.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhengxiu Fan, Jian-Da Shao, Kui Yi, Gongjie Yin, and Lixiang Yuan "Study of soft x-ray multilayer thin film", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190753; https://doi.org/10.1117/12.190753
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