You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
26 October 1994Synthesis of oxide films from metallo-organic liquid precursors
Metal oxide films have been successfully prepared from carboxylate, alkoxide, mixed alkoxide/carboxylate precursors. The formation of molecular clusters in these systems offers significant advantages in the preparation of multi-component ceramic thin films, in terms of processing temperature, homogeneity, and stoichiometry control. Alkoxide precursors have been known for network formation in the solution by hydrolysis and polymerization, while carboxylate precursors do not normally show such tendencies. The objective of this work was to study the cluster formation in the carboxylate and mixed alkoxide/carboxylate systems using a variety of analytical techniques, including FT-IR, Mass Spectroscopy, and NMR. Results indicate such clusters do form under controlled conditions, and likewise aid the formation of highly homogeneous films at low temperature. The deposition of oxide films on a variety of substrates from various liquid precursors is becoming a proven technology with attractive possibilities for low cost fabrication. Understanding and control of solution chemistry is critical to its success.
The alert did not successfully save. Please try again later.
Relva C. Buchanan, Peir Yung Chu, "Synthesis of oxide films from metallo-organic liquid precursors," Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190721