17 April 1995 Measurement of the absolute accuracy (to <0.5%) of a clip-level beam profiler using Fresnel diffraction by a wide slit
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Abstract
By comparing the measured width of an optical test patten to the known width, the absolute error of a clip-level profiler is determined to be (-0.1 +/- 0.3)%. An expanded fundamental mode beam illuminates a pair of opposed knife edges (a wide slit) to generate the test pattern by Fresnel diffraction. Analysis of the diffraction pattern gives 18.2% as the appropriate clip level to read the geometrical shadow width between edges (with additional small adjustments for illumination non-uniformity and the finite size of the scanning aperture). The separation between the edges is determined by mechanical translation edge to edge through a focused beam. 3
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Thomas F. Johnston, Thomas F. Johnston, John M. Fleischer, John M. Fleischer, } "Measurement of the absolute accuracy (to <0.5%) of a clip-level beam profiler using Fresnel diffraction by a wide slit", Proc. SPIE 2375, Beam Control, Diagnostics, Standards, and Propagation, (17 April 1995); doi: 10.1117/12.206987; https://doi.org/10.1117/12.206987
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