12 May 1995 Advances in oscillatory optical scanners
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Technical developments in the past few decades have led to scanners with greater accuracy and higher frequencies of operation at larger scan angles with wider apertures. The causes of this evolution of galvanometric and resonant scanners, whose attributes make sophisticated applications possible, are given in order to anticipate future requirements and technologies for the next generation of these scanning devices.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerald F. Marshall, Gerald F. Marshall, Jean I. Montagu, Jean I. Montagu, } "Advances in oscillatory optical scanners", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209048; https://doi.org/10.1117/12.209048

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