12 May 1995 Integrated micro-opto-mechanical systems
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Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995); doi: 10.1117/12.209056
Event: Photonics West '95, 1995, San Jose, CA, United States
Abstract
We are developing integrated micro-opto-mechanical systems (MOMS) based upon wafer integration of optical and micro-electromechanical components. In this paper, we describe our developments in micro-opto-mechanical systems in the area of microscanners and moveable optical elements. The microscanners are based upon the fabrication of micro-optical elements on the rotors of large diameter, i.e. 500 to 2,000 micrometers , polysilicon micromotors and have resulted in two approaches to scanning. In the first approach, nickel plating and high-aspect- ratio photolithography were used to produce 175 micrometers diameter, 20 micrometers tall nickel polygon reflectors on the rotors of polysilicon micromotors. These polygon microscanners are suitable for planar scanning as well and other planar applications such as optical fiber and waveguide switches. In a second approach, 2 - 4 micrometers spatial period diffraction gratings were fabricated on the solid rotors of polysilicon micromotors. Such devices are suitable for applications requiring out-of-plane scanning, e.g., bar code readers, and take advantage of planar processing. Chemical-mechanical polishing was used to reduce the polysilicon rotor's average surface roughness (Ra) from 420 angstrom to below 17 angstrom, improving the optical performance of the diffraction gratings. Diffraction grating microscanners using salient pole micromotors have been operated at voltages as low as 45 V, with maximum operational speeds of 1100 rpm. Although microscanners based upon rotating reflectors and diffraction gratings are significant, future MOMS also require linear motion of optical elements and optical waveguides to carry light between optical elements. To this end, we have produced optical reflectors on linear translational comb actuators.
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Francis L. Merat, Mehran Mehregany, "Integrated micro-opto-mechanical systems", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209056; https://doi.org/10.1117/12.209056
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KEYWORDS
Diffraction gratings

Nickel

Reflectors

Chemical mechanical planarization

Diffraction

Optical components

Optical lithography

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