12 May 1995 Integration of micromirror and mixed-signal ICs for optical information processing
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The Texas Instruments flexure beam micromirror represents one of the most promising structures for production because of its reproducibility, which results from its symmetrical supporting structure. Flexure beam micromirrors modulate light in phase with a piston-flap motion that changes the length of the optical path. The device allows us to perform analog phase modulation by balancing spring and electrostatic forces. To fully use the analog phase capability, we need a mixed-signal circuit to drive it, but fortunately, micro-mirror technology is compatible with IC processes. Texas Instruments owns not only this unique micromirror design, but also a world-class mixed-signal production line. The main issue in production is maintaining the hinge strength to overcome stress caused by nonuniformity while staying within the range of analog CMOS driver compliance restrictions.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tseng-Hwang Lin, Tseng-Hwang Lin, "Integration of micromirror and mixed-signal ICs for optical information processing", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209055; https://doi.org/10.1117/12.209055

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