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12 May 1995 Microfocusing optical device using piezoelectric thin-film actuator
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Abstract
A novel micro focusing optical device controlled by a piezoelectric thin film micro actuator has been presented. This device is provided by bonding two micromachined substrates, which are a glass substrate integrated with a surface emitting light element and a micro Fresnel lens on each surface, and a silicon substrate with a diaphragm type of piezoelectric thin film actuator on it. The surface of the thin film is used as a movable reflection mirror. Focusing is performed by changing position of the mirror surface along the optical axis. In the case of applying the micro lens with 1.3 mm of diameter and 0.33 of N.A. to this focusing device and the thin film actuator capable of several micron displacement, focal point shifting of over 100 mm is obtained. Applying the device to optical senors such as a barcode reader, miniaturization of the light source and high resolution detecting for wide range could be possible.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Goto, Shyuichi Wakabayashi, Masaaki Ikeda, Minoru Sakata, Koichi Imanaka, Masashi Takeuchi, and Tsuneji Yada "Microfocusing optical device using piezoelectric thin-film actuator", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209015
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