12 May 1995 Testing high-performance galvanometer-based optical scanners
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Abstract
As the speed and accuracy requirements increase for Galvanometer based optical scanners so does the need for higher performance test equipment. This paper summarizes the practice and challenge of designing such instruments.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bruce E. Rohr "Testing high-performance galvanometer-based optical scanners", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209050; https://doi.org/10.1117/12.209050
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