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12 May 1995 XY scan engine with microradian accuracy
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Abstract
This paper analyzes the sources of error which shape the accuracy of a flat field raster scanning engine. It briefly describes the critical characteristics of the optical elements, scanners, electronics, laser, and structural design selected to build an engine with a system of accuracy of 0.35 micron, a 3.5 micron spot, and a telecentric work area of 25 mm diameter.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean I. Montagu, Herman DeWeerd, and Peter Honkanen "XY scan engine with microradian accuracy", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209049
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