Analysis of surfaces, films, and multilayers by resonant laser ablation

T. M. Allen; C. H. Smith; Peter B. Kelly; John E. Anderson; Gregory C. Eiden; A. W. Garrett; C. G. Gill; P. H. Hemberger; Nicholas S. Nogar

doi:10.1117/12.206451

7 April 1995 Analysis of surfaces, films, and multilayers by resonant laser ablation

T. M. Allen, C. H. Smith, Peter B. Kelly, John E. Anderson, Gregory C. Eiden, A. W. Garrett, C. G. Gill, P. H. Hemberger, Nicholas S. Nogar

Author Affiliations +

Proceedings Volume 2385, Advanced Optical Methods for Ultrasensitive Detection; (1995) https://doi.org/10.1117/12.206451
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

In this manuscript we review briefly the history of Resonant Laser Ablation (RLA), and discuss some current ideas regarding sample preparation, laser parameters, and mechanisms. We also discuss current applications including spectral analysis of trace components, depth profiling of thin films and multilayer structures, and the use of RLA with the Ion Trap Mass Spectrometer (ITMS).

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T. M. Allen, C. H. Smith, Peter B. Kelly, John E. Anderson, Gregory C. Eiden, A. W. Garrett, C. G. Gill, P. H. Hemberger, and Nicholas S. Nogar "Analysis of surfaces, films, and multilayers by resonant laser ablation", Proc. SPIE 2385, Advanced Optical Methods for Ultrasensitive Detection, (7 April 1995); https://doi.org/10.1117/12.206451

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