17 March 1995 Integrated optics devices by ultraviolet light imprinting in sol-gel silica glass
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Abstract
We describe a simple low temperature method to produce integrated optics devices in a photosensitive, hybrid, organically modified sol-gel silica glass. In particular, we report on fabrication and characterization of slab and channel waveguides, waveguides with grating and a directional coupler. The fabrication process is appealing for its simplicity, entailing few steps and utilizing elementary photodefinition to give robust, mechanically rigid devices.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Iraj Najafi, S. Iraj Najafi, C.-Y. Li, C.-Y. Li, Mark P. Andrews, Mark P. Andrews, J. E. Chisham, J. E. Chisham, Paul Lefebvre, Paul Lefebvre, John D. Mackenzie, John D. Mackenzie, Nasser Peyghambarian, Nasser Peyghambarian, } "Integrated optics devices by ultraviolet light imprinting in sol-gel silica glass", Proc. SPIE 2401, Functional Photonic Integrated Circuits, (17 March 1995); doi: 10.1117/12.205028; https://doi.org/10.1117/12.205028
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