12 April 1995 Three-dimensional (3D) displacement measurement by a holographic interferometric microscope
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Abstract
A holographic interferometric microscope is presented, which combines conjugate reconstruction and two-reference beam method to apply the static evaluation method with 3 illumination directions. In this way the determination of every component of small displacements over objects which are smaller than a millimeter is possible. A solder bond and a surface mounted resistor were used to test the performance of the proposed hologram- microscopic arrangement. The thermal deformations under operation conditions were investigated. The orthogonal displacement components were calculated from the experimental results and compared with the expected deformation behavior.
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Oliver Kruschke, Oliver Kruschke, Guenther K.G. Wernicke, Guenther K.G. Wernicke, Hartmut Gruber, Hartmut Gruber, } "Three-dimensional (3D) displacement measurement by a holographic interferometric microscope", Proc. SPIE 2406, Practical Holography IX, (12 April 1995); doi: 10.1117/12.206228; https://doi.org/10.1117/12.206228
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