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24 April 1995 L2 laser repair system: high-throughput repair of 800 x 800 mm flat panel substrates
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Abstract
Inspection and repair offer higher yields and lower costs for AMLCDs, plasma displays and field emission displays, especially as display size increases. For repair to contribute, it must be fast and fully reliable. Building on L1 technology, a second generation L2 laser repair tool utilizes laser cutting and laser deposition technologies to repair electrical open and short defects on the active plates and on the passive color filter plates. This paper details engineering modifications which significantly reduce the time to repair a panel while maintaining repair reliability. Moreover, the L2 can receive up to 800 X 800 mm substrates of varied thickness.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. David Casey Jr., Mark DiManna, R. W. DiNuccio, N. J. Guarino, Russell Mello, Alex F. Pless, G. Onorio, S. Shenoy, David A. Townzen, and Don E. Yansen "L2 laser repair system: high-throughput repair of 800 x 800 mm flat panel substrates", Proc. SPIE 2408, Liquid Crystal Materials, Devices, and Displays, (24 April 1995); https://doi.org/10.1117/12.207517
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