10 April 1995 Linear thin-film position-sensitive detector (LTFPSD) for 3D measurements
Author Affiliations +
A linear array thin film position sensitive detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3-D inspections/measurements. Each element consists on a one- dimensional LTFPSD, based on a p.i.n. diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it is possible to acquire information about an object/surface, through the optical cross-section method. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rodrigo Martins, Rodrigo Martins, Guilherme Lavareda, Guilherme Lavareda, Elvira Fortunato, Elvira Fortunato, Fernando Soares, Fernando Soares, Luis Fernandes, Luis Fernandes, Luis Alberto Almeida Ferreira, Luis Alberto Almeida Ferreira, "Linear thin-film position-sensitive detector (LTFPSD) for 3D measurements", Proc. SPIE 2415, Charge-Coupled Devices and Solid State Optical Sensors V, (10 April 1995); doi: 10.1117/12.206509; https://doi.org/10.1117/12.206509


Review of the state of the art of whole field...
Proceedings of SPIE (November 15 2011)
Optical studies of dye-coated superconductor junctions
Proceedings of SPIE (June 09 1996)
From intelligent materials to smart sensors
Proceedings of SPIE (April 25 1996)
Shadow Vision
Proceedings of SPIE (October 11 1988)
Matrix of light sensors addressed by a Si H TFTs...
Proceedings of SPIE (April 26 1999)

Back to Top