Submicrometer feature analysis using optical Gabor transforms

Michael Friedmann; Joseph Shamir

doi:10.1117/12.211198

6 June 1995 Submicrometer feature analysis using optical Gabor transforms

Michael Friedmann, Joseph Shamir

Proceedings Volume 2426, 9th Meeting on Optical Engineering in Israel; (1995) https://doi.org/10.1117/12.211198
Event: Optical Engineering in Israel: 9th Meeting, 1994, Tel-Aviv, Israel

Abstract

A particular form of the Gabor transform is optically implemented using a scanning Gaussian beam. The optical Gabor transform is then used to analyze the field diffracted by targets with features comparable to the wavelength of the incident radiation. Computer simulations and experimental results demonstrate that the optical Gabor transform is a powerful tool for the identification and measurement of wavelength and sub-wavelength features.

Citation Download Citation

Michael Friedmann and Joseph Shamir "Submicrometer feature analysis using optical Gabor transforms", Proc. SPIE 2426, 9th Meeting on Optical Engineering in Israel, (6 June 1995); https://doi.org/10.1117/12.211198

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