Comparison of laser-induced damage morphology in three model thin-film systems: HfO2, Y2O3, and Ta2O5

Semyon Papernov; Ansgar W. Schmid

doi:10.1117/12.213756

14 July 1995 Comparison of laser-induced damage morphology in three model thin-film systems: HfO₂, Y₂O₃, and Ta₂O₅

Semyon Papernov, Ansgar W. Schmid

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213756
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

Post-mortem atomic force mocroscopy (AFM) analysis of 1 micrometers thick, monolayer, delectric coatings of HfO₂, Y₂O₃, and Ta₂O₅ , all prepared by conventional e-beam deposition, was carried out on irradiated sites of moderate-level damage after 1054-nm irradiation by identical laser pulses. Analysis of all maps shows that growth nodules, long believed to be the prime laser-damage drivers, are few in all of our films and are irrelevant to damage here. Damage morphology was represented by micrometer-scale craters and domes. Crater sizes and depths, linked to the sizes and positions of absorbing defects in the film media, indicate that average absorber size increases from HfO₂ to Y₂O₃ to Ta₂O₅. HFO₂ also has the shallowest craters, while Ta₂O₅ samples consistently damage near the film- substrate interface, with yttria falling in between these extremes. Crater cross sections reveal a predominance of conical wall formations, pointing towards a thermal- explosion mechanism of crater formation. Domes that were found to be entirely absent in Ta₂O₅, occur with approximately 2% probablility in Y₂O₃, i.e., 2% of all mapped defects were domes with more than 25% probablility in HfO₂ films. Obtained results suggest that domes are crater precursors, i.e., arrested damage events because of lack of sufficient energy transfer from the absorbing inclusion.

Citation Download Citation

Semyon Papernov and Ansgar W. Schmid "Comparison of laser-induced damage morphology in three model thin-film systems: HfO₂, Y₂O₃, and Ta₂O₅", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213756

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