14 July 1995 Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers
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Abstract
LaF3/MgF2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Norbert Kaiser, Norbert Kaiser, Bernhard Anton, Bernhard Anton, H. Jaenchen, H. Jaenchen, Klaus R. Mann, Klaus R. Mann, Eric Eva, Eric Eva, C. Fischer, C. Fischer, Rainer Henking, Rainer Henking, Detlev Ristau, Detlev Ristau, Peter Weissbrodt, Peter Weissbrodt, Dirk Mademann, Dirk Mademann, L. Raupach, L. Raupach, Erich J. Hacker, Erich J. Hacker, } "Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); doi: 10.1117/12.213762; https://doi.org/10.1117/12.213762
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