Total internal reflection microscopy (TIRM) as a nondestructive subsurface damage assessment tool

Zhi M. Liao; Simon J. Cohen; John R. Taylor

doi:10.1117/12.213733

14 July 1995 Total internal reflection microscopy (TIRM) as a nondestructive subsurface damage assessment tool

Zhi M. Liao, Simon J. Cohen, John R. Taylor

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213733
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

An easy to use, nondestructive method for evaluating subsurface damage in polished substrates has been established at LLNL. Subsurface damage has been related to laser damage in coated optical components used in high power, high repetition rate laser systems. Total Internal Reflection Microscopy (TIRM) has been shown to be a viable nondestructive technique in analyzing subsurface damage in optical components. A successful TIRM system has been established for evaluating subsurface damage on fused silica components. Laser light scattering from subsurface damage sites is collected through a Nomarski microscope. These images are then captured by a CCD camera for analysis on a computer. A variety of optics, including components with intentional subsurface damage due to grinding and polishing, have been analyzed and their TIRM images compared to an existing destructive etching method. Methods for quantitative measurement of subsurface damage are also discussed.

Citation Download Citation

Zhi M. Liao, Simon J. Cohen, and John R. Taylor "Total internal reflection microscopy (TIRM) as a nondestructive subsurface damage assessment tool", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213733

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