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9 June 1995 Effect of molecular weight distribution on the dissolution properties of novolac blends
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Abstract
The dissolution properties of nearly monodisperse fractions of metacresol novolac resin in aqueous potassium hydroxide solutions has been investigated. A relationship between the molecular weight of the fractions and dissolution rate was examined for a range of developer concentrations. Deliberate and calculated blending of the various fractions afforded an opportunity to investigate the fundamental relationship between molecular weight and dissolution characteristics over a range of developer concentrations.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pavlos C. Tsiartas, Logan L. Simpson, Anwei Qin, C. Grant Willson, Robert D. Allen, Val J. Krukonis, and Paula M. Gallagher-Wetmore "Effect of molecular weight distribution on the dissolution properties of novolac blends", Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); https://doi.org/10.1117/12.210347
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