9 June 1995 Lithography and the future of Moore's law
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Abstract
The definition of `Moore's Law' has come to refer to almost anything related to the semiconductor industry that when plotted on semi-log paper approximates a straight line. I hesitate to review its origins and by doing so restrict its definition. However, this paper is a review of the history and past performance relative to predictions and shows where the advances have come from. I will leave the future performance up to you. Certainly continuing on the same slope doesn't get any easier. It presents a difficult challenge to the industry.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gordon E. Moore, "Lithography and the future of Moore's law", Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); doi: 10.1117/12.210341; https://doi.org/10.1117/12.210341
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