You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
22 May 1995Automatic defect classification: status and industry trends
As device geometries shrink to 0.25 micron and smaller, all facets of integrated circuit (IC) processing are being challenged. With device sizes shrinking, so too shrinks the size of a defect that can cause chip failure, and hence yield loss. Contamination free manufacturing practices are becoming critical for successful device fabrication. To accomplish this, elimination of defect sources has a high priority. A defect can be a particle, microcontamination, pattern anomaly, crystalline defect such as a stacking fault, and so on. Defects have become a main source of yield loss to the semiconductor industry. This comes at a time when 90% yield values on mature product cannot increase at the rate that has occurred in the past. The industry is now faced with finding methods of incremental yield increase, in-line, on production wafers. Automatic Defect Classification (ADC) is an important part of SEMATECH's strategy to meet these industry needs.
The alert did not successfully save. Please try again later.
Marylyn Hoy Bennett, Kenneth W. Tobin Jr., Shaun S. Gleason, "Automatic defect classification: status and industry trends," Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); https://doi.org/10.1117/12.209203