22 May 1995 CD control using latent image for lithography
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Abstract
As a design rule of LSI device gets smaller, critical dimension (CD) control becomes increasingly difficult. This creates a new technology to CD control accurately. The technology utilizes intensity of light diffracted from latent image consisting of periodic patterns in undeveloped photoresist, and its possibility has been reported for several years. We have developed a new method of the CD control by monitoring profile of the latent image using atomic force microscope (AFM). The reduction of CD variation using this method is achieved by controlling development time from the relationship between the profile of the latent image and CD after development. We have tried to apply this method to a resist process in KrF excimer laser lithography and found usefulness of the method for 0.25 micrometers lithography.
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Taichi Koizumi, Taichi Koizumi, Takahiro Matsuo, Takahiro Matsuo, Masayuki Endo, Masayuki Endo, Masaru Sasago, Masaru Sasago, "CD control using latent image for lithography", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209226; https://doi.org/10.1117/12.209226
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