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22 May 1995 Metrology with the ultraviolet scanning transmission microscope
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Abstract
A novel design for an ultraviolet critical dimension measurement transmission microscope utilizing the Stewart platform as the rigid main structure has been implemented. This new design shows improved vibration characteristics and is able to accommodate large specimens. We present alignment procedures and their relevance to obtaining accurate linewidth measurements. Initial measurements with the new system comparing visible and ultraviolet wavelength illumination show expected characteristic dependence of the intensity image as a function of wavelength.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard M. Silver, James E. Potzick, and J. Y-Chien Hu "Metrology with the ultraviolet scanning transmission microscope", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); https://doi.org/10.1117/12.209228
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