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22 May 1995 Thin film composite actuators
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The mechanical properties of Ni50Ti50 deposited on Si substrates were studied focussing on the interaction of the film and substrate. This interaction determines the transformation characteristics through interface accommodation and mechanical constraints exerted by the substrate stiffness. Substrate stiffness, controlled by the film/substrate thickness ratio, was found to have a substantial influence on the output energy of the film/substrate composite. A switch type composite based on this knowledge was fabricated and tested. The thermo-mechanical properties of Terfenol-D thin films deposited on Si substrates were studied by static and dynamic measurements of film/substrate composite cantilevers. The Curie transition, (Delta) E effect and mechanical damping of the film were measured simultaneously. The stress in the film was controlled by annealing below the recrystallization temperature and determined to vary from -500 MPa, compression, in as deposited films to +480 MPa, tension, in annealed films. The Curie temperature shifts from 80 degree(s)C to 140 degree(s)C as the tension increases while the structure of the film remains amorphous. The stress change induced by annealing also drastically effects the film's damping characteristics. The (Delta) E effect of the amorphous material, about 20%, was used to estimate the magnetostriction, (lambda) s approximately equals 4 (DOT) 10-3.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quanmin Su, Taesung Kim, Yun Zheng, and Manfred R. Wuttig "Thin film composite actuators", Proc. SPIE 2441, Smart Structures and Materials 1995: Smart Materials, (22 May 1995);

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