22 February 1995 Laser-fiber coupling by means of a silicon micro-optical bench and a self-aligned soldering process
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Proceedings Volume 2449, Fiber Optic Network Components; (1995) https://doi.org/10.1117/12.201968
Event: Advanced Networks and Services, 1995, Amsterdam, Netherlands
The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5 micrometers in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by gluing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then gluing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below +/- 0.5 micrometers in lateral and vertical direction. Mounting the laser diode by means of a self-aligned soldering process, an additional contribution to the precise alignment of the laser is further improved.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Peter Schmidt, Jan Peter Schmidt, A. Cordes, A. Cordes, Joerg Mueller, Joerg Mueller, Hans Burkhardt, Hans Burkhardt, } "Laser-fiber coupling by means of a silicon micro-optical bench and a self-aligned soldering process", Proc. SPIE 2449, Fiber Optic Network Components, (22 February 1995); doi: 10.1117/12.201968; https://doi.org/10.1117/12.201968

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