Metastable eutectics in multilayers

L. S. Palatnik; Anatoli I. Fedorenko

doi:10.1117/12.200279

23 January 1995 Metastable eutectics in multilayers

L. S. Palatnik, Anatoli I. Fedorenko

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200279
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

The effect of phase equilibrium at multilayer interfaces on melting temperature of multilayer x-ray mirrors is reported. Based on phase equilibrium diagram of alloys, approach to an estimation of melting temperature and component concentrations of metastable eutectics is suggested. Application of this approach to metastable Mo-Si and W-Si multilayer x-ray mirrors revealed that phase nonequilibrium can decrease substantially the multilayer melting temperature (by approximately equals 200 degree(s)C in case of metastable Mo-Si eutectic in comparison with the most light-melted stable MoSi₂-Si eutectic in the whole Mo-Si system).

Citation Download Citation

L. S. Palatnik and Anatoli I. Fedorenko "Metastable eutectics in multilayers", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200279

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