The roles of the absorption magnitude, the surface roughness with small correlation radii and the transition layer in the anomalous scattering peak formation have been considered. Joint measurements of scattering indictrices and near threshold specular reflection spectra fine structure have permitted to estimate a strong sensitivity of the anomalous peak to the presence of transition layers characterized by distortion of long-range order connected with some kind of macrodefects (like grain boundaries, disclinations, dislocations, etc.). Studying the layer system Si-SiO2 a strong dependence of the intensity of this peak on the dioxide thickness has been discovered.
Elena O. Filatova,
"Regularities of the Yoneda effect in the region of ultrasoft x-ray radiation", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200270; https://doi.org/10.1117/12.200270