23 January 1995 Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge
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Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200278
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation
Abstract
Annealing effects in short-period multilayers Cr3C2/C, TiC/C, Cr3C2/(B+C) and CrB2/C were studied in wide temperature range approximately equals 200-1200 degree(s)C by X-ray scattering and cross-sectional microscopy. It was shown that thermodynamic equilibrium of layers materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. A. Bugaev, Anatoli I. Fedorenko, V. V. Kondratenko, E. N. Zubarev, "Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200278; https://doi.org/10.1117/12.200278
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