23 January 1995 Whispering gallery optics for synchrotron radiation beam lines
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Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200267
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation
Abstract
Applications of the whispering gallery (WhG) optics for the steering of the synchrotron radiation (SR) are considered. The general principles of operation of the vertical SR beamline for proximity X-ray lithography are discussed. The possibilities of the WhG optics for the transportation of the SR beam to the second floor and for the steering of the hard X-ray radiation are analyzed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor V. Kozhevnikov, Igor V. Kozhevnikov, } "Whispering gallery optics for synchrotron radiation beam lines", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200267; https://doi.org/10.1117/12.200267
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